We report the expansion of epitaxial wurtzite AlScN skinny movies on Si (111) substrates with a variety of Sc concentrations utilizing ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity and induces ferroelectricity, and epitaxial skinny movies facilitate systematic structure-based investigations of this necessary and rising class of supplies. Two major results are noticed as a operate of accelerating Sc focus. First, growing crystalline dysfunction is noticed along with a structural transition from wurtzite to rocksalt at ∼30 at% Sc. Second, nanoscale compositional segregation according to spinodal decomposition happens at intermediate compositions, earlier than the wurtzite to rocksalt section boundary is reached. Lamellar options arising from composition fluctuations are correlated with polarization domains in AlScN, suggesting that composition segregation can affect ferroelectric properties. The current outcomes present a path to the creation of single crystal AlScN movies on Si (111), in addition to a way for self-assembled composition modulation.
